Eigenphase Technologies

at eigenphase we fabricate prototype devices and custom scientific instrumentation for our customers. nanofabrication of prototype devices at cornell university is a large part of what we do. we do a lot of work at the cornell nanoscale facility (the cnf) where we have intimate access to $250 million dollars worth of equipment to develop new processes and fabricate never-before-seen devices for our customers. we work with numerous resist systems and do lithography of all types (contact, stepper and electron beam). we do wet chemical etching and reactive ion etching of all different materials using numerous etch chemistries. we work with silicon, silicon carbide, fused silica, quartz, sapphire, germanium, gallium arsenide, lithium niobate, lithium tantalate and aluminum nitride among others. we do coatings and depositions of all types including lpcvd, pecvd, atomic layer deposition, thermal oxidation, evaporation, sputter deposition, spraycoat deposition, molecular vapor deposition, etc